题目：Growth and Characterization of AlN and AlGaN Epitaxial Films on AlN Single Crystal Substrates
作者:作者: Dalmau, R (Dalmau, R.); Moody, B (Moody, B.); Schlesser, R (Schlesser, R.); Mita, S (Mita, S.); Xie, J (Xie, J.);等
来源出版物: JOURNAL OF THE ELECTROCHEMICAL SOCIETY  卷: 158   期: 5   页: H530-H535   DOI: 10.1149/1.3560527   出版年: 2011