|
Reactive Ion Etching of InAs, InSb, and GaSb in CCL2F2/O2 and C2H6/H2 [2010-05-07] |
Reactive Ion Etching of InAs, InSb, and GaSb in CCL2F2/O2 and C2H6/H2
S. J. Pearton, W. S. Hobson, F. A. Baiocchi, and K. S. Jones, J. Electrochem. Soc., 137, 1924 (1990).
附件下载
|
