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Stress and Microstructure in Lpcvd Polycrystalline Silicon Films: Experimen [2012-04-29] |
Stress and Microstructure in Lpcvd Polycrystalline Silicon Films: Experimental Results and Closed Form Modeling of Stresses
1991 MRS Fall Meeting.
P. Krulevitcha1, G. C. Johnsona1 and R. T. Howea2
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