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Silicon epitaxial growth on poly-Si film by HWCVD for low-temperature poly- [2010-11-30] |
| Silicon epitaxial growth on poly-Si film by HWCVD for low-temperature poly-Si TFTs 作者: Lee SR (Lee, Seung Ryul), Ahn KM (Ahn, Kyung Min), Ahn BT (Ahn, Byung Tae) 来源出版物: JOURNAL OF THE ELECTROCHEMICAL SOCIETY 卷: 154 期: 9 页: H778-H781 出版年: 2007 附件下载 |
