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Mobility Enhancement by Strained Nitride Liners for 65nm CMOS Logic Design [2010-05-05] |
| Mobility Enhancement by Strained Nitride Liners for 65nm CMOS Logic Design Features Claude Ortolland, Pierre Morin, Franck Arnaud, Stephane Orain, Chandra Reddy, Catherine Chaton, Peter Stolk materials research society Volume 913,2006 |
