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Oxidation of Chemically-Vapor-Deposited Silicon Nitride and Single-Crystal [2011-04-01] |
Oxidation of Chemically-Vapor-Deposited Silicon Nitride and Single-Crystal Silicon
D. J. Choi, D. B. Fischbach and W. D. Scott: J. Am. Ceram. Soc., 72 (1989), 1118.
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