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Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography
[2010-07-13]
Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography
Marc A. Unger, Hou-Pu Chou, Todd Thorsen, Axel Scherer, and Stephen R. Quake
Science 7 April 2000 288: 113-116 [DOI: 10.1126/science.288.5463.113] (in Reports)