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Roughness reduction of 3C-SiC surfaces using SiC-based mechanical polishing [2010-03-03] |
| 标题: Roughness reduction of 3C-SiC surfaces using SiC-based mechanical polishing slurries 作者: Yasseen, AA; Zorman, CA; Mehregany, M 来源出版物: JOURNAL OF THE ELECTROCHEMICAL SOCIETY 卷: 146 期: 1 页: 327-330 出版年: 1999 |
