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A DLTS Study of SiO(2) and SiO(2)/SiN(x) Surface Passivation of Silicon
[2012-02-16]

Simoen, E., C. Gong, et al. (2011).
"A DLTS Study of SiO(2) and SiO(2)/SiN(x) Surface Passivation of Silicon."
Journal of the Electrochemical Society
158(6): H612-H617.