A DLTS Study of SiO(2) and SiO(2)/SiN(x) Surface Passivation of Silicon
[2012-02-16]
Simoen, E., C. Gong, et al. (2011). "A DLTS Study of SiO(2) and SiO(2)/SiN(x) Surface Passivation of Silicon." Journal of the Electrochemical Society 158(6): H612-H617.