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The first surface micromachined pressure sensor for cardiovascular pressure measurements [2017-07-17] |
| Abstract: A surface micromachined pressure sensor for blood pressure measurements has been commercialized. Using a polysilicon surface micromachining process, a silicon chip with the dimensions of 100/spl times/150/spl times/1300 /spl mu/m and a polysilicon diaphragm area of 103/spl times/103 /spl mu/m has been fabricated. The piezoresistive pressure sensor has a typical pressure sensitivity of 2.0 /spl mu/V/V mmHg which results in a blood pressure measurement accuracy better than 2 mmHg. This new pressure sensor is used clinically for blood pressure measurements in balloon angioplasty applications. Published in: Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on Date of Conference: 25-29 Jan. 1998 Date Added to IEEE Xplore: 06 August 2002 ISBN Information: Print ISSN: 1084-6999 INSPEC Accession Number: 5991945 Publisher: IEEE Conference Location: Heidelberg, Germany, Germany 17111331746.pdf |
