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Wet chemical etching process for wafer scale isolation and interconnection of GaSb based device layers grown on GaAs substrates
[2016-04-14]

Wet chemical etching process for wafer scale isolation and interconnection of GaSb based device layers grown on GaAs substrates
J. Vac. Sci. Technol. B 31, 031204 (2013)


148570616.pdf