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Analysis of Bonding‐Related Gas Enclosure in Micromachined Cavities Sealed by Silicon Wafer Bonding [2015-11-23] |
| Analysis of Bonding‐Related Gas Enclosure in Micromachined Cavities Sealed by Silicon Wafer Bonding 作者 ： S. Macka, H. Baumannb, U. Göselea, H. Wernerc and R. Schlöglc
23103950834.pdf |
