In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.

Preface.

1. Introduction.

2. Generation of Highly Uniform, High-density Inductively Coupled Plasma.

3. Plasma Sources: Meeting the Demands of nanotechnology.

4. Carbon-Based nanostructures.

5. Quantum Confinement Structures.

6. Hydroxyapatite Bioceramics.

7. Other Examples of Plasma-Aided Nanofabrication.

8. Further Examples, Conclusions, and Outlook.

References.

Index.