MEMS TECHNOLOGY AND DEVICES: PROCEEDINGS OF THE ICMAT 2007 CONFERENCE 

by LIU AI QUN ET AL (Author)

索书号：TN40/I61

This volume covers the current trends and developments in microelectromechanical systems (MEMS) technologies and devices, particularly applications that involve MEMS design, modeling, fabrication processes, lab-on-a-chip, biophotonic, medical devices such as DNA, protein and cell sorting, and nano devices. The contributions also explore new devices, process innovation, and engineering applications related to MEMS technology and devices.